Fabrication of Dielectrophoretic Devices Using Poly-dimethylsiloxane Microstructures by Proton Beam Writing

Y. Shiine, H. Nishikawa, Y. Furuta, K. Kanamitsu, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009).
Publication status	Published - 2009 Sept 1

Cite this

@article{329f7f5809c24473bd35693e74e88a0d,

title = "Fabrication of Dielectrophoretic Devices Using Poly-dimethylsiloxane Microstructures by Proton Beam Writing",

author = "Y. Shiine and H. Nishikawa and Y. Furuta and K. Kanamitsu and T. Satoh and Y. Ishii and T. Kamiya and R. Nakao and S. Uchida",

year = "2009",

month = sep,

day = "1",

language = "English",

journal = "Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009).",

}

TY - JOUR

T1 - Fabrication of Dielectrophoretic Devices Using Poly-dimethylsiloxane Microstructures by Proton Beam Writing

AU - Shiine, Y.

AU - Nishikawa, H.

AU - Furuta, Y.

AU - Kanamitsu, K.

AU - Satoh, T.

AU - Ishii, Y.

AU - Kamiya, T.

AU - Nakao, R.

AU - Uchida, S.

PY - 2009/9/1

Y1 - 2009/9/1

M3 - Article

JO - Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009).

JF - Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009).

ER -