Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW)

N. Uchiya, Y. Furuta, H. Nishikawa, T. Watanabe, J. Haga, T. Sato, Y. Ishii, T. Kamiya

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	201-202
Journal	7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007)
Publication status	Published - 2007 Jun 7

Cite this

@article{11a8aad0b1964d0693ed588adfc35850,

title = "Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW)",

author = "N. Uchiya and Y. Furuta and H. Nishikawa and T. Watanabe and J. Haga and T. Sato and Y. Ishii and T. Kamiya",

year = "2007",

month = jun,

day = "7",

language = "English",

pages = "201--202",

journal = "7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007)",

}

TY - JOUR

T1 - Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW)

AU - Uchiya, N.

AU - Furuta, Y.

AU - Nishikawa, H.

AU - Watanabe, T.

AU - Haga, J.

AU - Sato, T.

AU - Ishii, Y.

AU - Kamiya, T.

PY - 2007/6/7

Y1 - 2007/6/7

M3 - Article

SP - 201

EP - 202

JO - 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007)

JF - 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007)

ER -