Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW)

N. Uchiya, Y. Furuta, H. Nishikawa, T. Watanabe, J. Haga, T. Sato, Y. Ishii, T. Kamiya

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)201-202
Journal7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007)
Publication statusPublished - 2007 Jun 7

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