Fabrication of magnetic nanostructures by electron beam induced deposition

Masaki Takeguchi, Masayuki Shimojo

Research output: Chapter in Book/Report/Conference proceedingChapter


Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.

Original languageEnglish
Title of host publicationNanomagnetism and Spintronics
Subtitle of host publicationFabrication, Materials, Characterization and Applications
PublisherWorld Scientific Publishing Co.
Number of pages17
ISBN (Electronic)9789814273060
ISBN (Print)9789814273053
Publication statusPublished - 2010 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • General Biochemistry,Genetics and Molecular Biology
  • General Engineering
  • General Physics and Astronomy


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