Fabrication of PMMA film waveguides utilizing proton beam writing

Kenta Miura; Takahiro Satoh; Yasuyuki Ishii; Masashi Kohka; Yuki Machida; Masato Uehara; Hiromu Kiryu; Katsuyoshi Takano; Takeru Ohkubo; Akiyoshi Yamazaki; Wataru Kada; Akihito Yokoyama; Tomihiro Kamiya; Hiroyuki Nishikawa; Tomoyuki Sasaki; Osamu Hanaizumi

Fabrication of PMMA film waveguides utilizing proton beam writing

Kenta Miura, Takahiro Satoh, Yasuyuki Ishii, Masashi Kohka, Yuki Machida, Masato Uehara, Hiromu Kiryu, Katsuyoshi Takano, Takeru Ohkubo, Akiyoshi Yamazaki, Wataru Kada, Akihito Yokoyama, Tomihiro Kamiya, Hiroyuki Nishikawa, Tomoyuki Sasaki, Osamu Hanaizumi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Proton beam writing (PBW) has attracted much attention recently as a next generation micro-fabrication technology. We fabricated the first single-mode, straight-line waveguides and Y-junction waveguides for λ=1.55 μm consisting of PMMA films using the PBW technique.

Original language	English
Title of host publication	16th Opto-Electronics and Communications Conference, OECC 2011
Pages	303-304
Number of pages	2
Publication status	Published - 2011 Oct 4
Event	16th Opto-Electronics and Communications Conference, OECC 2011 - Kaohsiung, Taiwan, Province of China Duration: 2011 Jul 4 → 2011 Jul 8

Publication series

Name	16th Opto-Electronics and Communications Conference, OECC 2011

Conference

Conference	16th Opto-Electronics and Communications Conference, OECC 2011
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	11/7/4 → 11/7/8

ASJC Scopus subject areas

Computer Networks and Communications
Electrical and Electronic Engineering
Communication

Cite this

Miura, K., Satoh, T., Ishii, Y., Kohka, M., Machida, Y., Uehara, M., Kiryu, H., Takano, K., Ohkubo, T., Yamazaki, A., Kada, W., Yokoyama, A., Kamiya, T., Nishikawa, H., Sasaki, T., & Hanaizumi, O. (2011). Fabrication of PMMA film waveguides utilizing proton beam writing. In 16th Opto-Electronics and Communications Conference, OECC 2011 (pp. 303-304). [6015135] (16th Opto-Electronics and Communications Conference, OECC 2011).

Miura, K, Satoh, T, Ishii, Y, Kohka, M, Machida, Y, Uehara, M, Kiryu, H, Takano, K, Ohkubo, T, Yamazaki, A, Kada, W, Yokoyama, A, Kamiya, T, Nishikawa, H, Sasaki, T & Hanaizumi, O 2011, Fabrication of PMMA film waveguides utilizing proton beam writing. in 16th Opto-Electronics and Communications Conference, OECC 2011., 6015135, 16th Opto-Electronics and Communications Conference, OECC 2011, pp. 303-304, 16th Opto-Electronics and Communications Conference, OECC 2011, Kaohsiung, Taiwan, Province of China, 11/7/4.

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title = "Fabrication of PMMA film waveguides utilizing proton beam writing",

abstract = "Proton beam writing (PBW) has attracted much attention recently as a next generation micro-fabrication technology. We fabricated the first single-mode, straight-line waveguides and Y-junction waveguides for λ=1.55 μm consisting of PMMA films using the PBW technique.",

author = "Kenta Miura and Takahiro Satoh and Yasuyuki Ishii and Masashi Kohka and Yuki Machida and Masato Uehara and Hiromu Kiryu and Katsuyoshi Takano and Takeru Ohkubo and Akiyoshi Yamazaki and Wataru Kada and Akihito Yokoyama and Tomihiro Kamiya and Hiroyuki Nishikawa and Tomoyuki Sasaki and Osamu Hanaizumi",

year = "2011",

month = oct,

day = "4",

language = "English",

isbn = "9781612842882",

series = "16th Opto-Electronics and Communications Conference, OECC 2011",

pages = "303--304",

booktitle = "16th Opto-Electronics and Communications Conference, OECC 2011",

note = "16th Opto-Electronics and Communications Conference, OECC 2011 ; Conference date: 04-07-2011 Through 08-07-2011",

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TY - GEN

T1 - Fabrication of PMMA film waveguides utilizing proton beam writing

AU - Miura, Kenta

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Kohka, Masashi

AU - Machida, Yuki

AU - Uehara, Masato

AU - Kiryu, Hiromu

AU - Takano, Katsuyoshi

AU - Ohkubo, Takeru

AU - Yamazaki, Akiyoshi

AU - Kada, Wataru

AU - Yokoyama, Akihito

AU - Kamiya, Tomihiro

AU - Nishikawa, Hiroyuki

AU - Sasaki, Tomoyuki

AU - Hanaizumi, Osamu

PY - 2011/10/4

Y1 - 2011/10/4

N2 - Proton beam writing (PBW) has attracted much attention recently as a next generation micro-fabrication technology. We fabricated the first single-mode, straight-line waveguides and Y-junction waveguides for λ=1.55 μm consisting of PMMA films using the PBW technique.

AB - Proton beam writing (PBW) has attracted much attention recently as a next generation micro-fabrication technology. We fabricated the first single-mode, straight-line waveguides and Y-junction waveguides for λ=1.55 μm consisting of PMMA films using the PBW technique.

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M3 - Conference contribution

AN - SCOPUS:80053304488

SN - 9781612842882

T3 - 16th Opto-Electronics and Communications Conference, OECC 2011

SP - 303

EP - 304

BT - 16th Opto-Electronics and Communications Conference, OECC 2011

T2 - 16th Opto-Electronics and Communications Conference, OECC 2011

Y2 - 4 July 2011 through 8 July 2011

ER -

Fabrication of PMMA film waveguides utilizing proton beam writing

Abstract

Publication series

Conference

ASJC Scopus subject areas

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