Fingerprint
Dive into the research topics of 'Fabrication of three-dimensional structures of resist by proton beam writing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Fabrication of three-dimensional structures of resist by proton beam writing
Yusuke Furuta, Naoyuki Uchiya, Hiroyuki Nishikawa, Junji Haga, Takahiro Sato, Masakazu Oikawa, Yasuyuki Ishii, Tomihiro Kamiya
Research output: Contribution to journal › Article › peer-review
21
Citations
(Scopus)