Fatigue testing machine of micro-sized specimens for MEMS applications

Y. Higo, K. Takashima, M. Shimojo, S. Sugiura, B. Pfister, M. V. Swain

Research output: Contribution to journalConference articlepeer-review

39 Citations (Scopus)


A new type of fatigue testing machine for micro-sized specimens for MEMS applications has been developed. This fatigue testing machine consists of a magnetostrictive actuator which is able to impart small displacements to a specimen upto 20 μm with resolution of 5 nm. The actuator is connected to a metal shaft and a diamond tip of 5 μm in radius is attached to the end of the shaft. Small displacements are applied to the specimen through the diamond tip. This makes it possible to construct a high stiffness loading fixture. The magnitude of load applied to the specimen is measured by a strain gauge type load cell with a load resolution of 10 μN. The specimen stage and load cell can be moved to adjust the loading position precisely by a stepping motor at a translation resolution of 0.1 μm. Cantilever beam type specimens with dimensions of 10 × 12 × 50 μm3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Very small cyclic load (ΔP = 0.1 - 40 mN) was able to be applied to the specimen successfully. This machine appears to be promising for evaluation of fatigue properties for micro-sized specimens for MEMS applications.

Original languageEnglish
Pages (from-to)241-246
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 2000
Externally publishedYes
EventMaterials Science of Microelectromechanical Systems (MEMS) Devices II - Boaton, MA, USA
Duration: 1999 Nov 291999 Dec 1

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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