TY - JOUR
T1 - Feasibility study of ultrasonic biometrics based on finger vessel imaging by epitaxial-PZT/Si piezoelectric micromachined ultrasonic transducer
AU - Liu, Ziyi
AU - Yoshida, Shinya
AU - Horie, Toshiaki
AU - Okamoto, Shoji
AU - Takayama, Ryoichi
AU - Tanaka, Shuji
N1 - Funding Information:
This work was partially supported by Asahi Glass Foundation and by JSPS KAKENHI Grant Number 18H01390 .
Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2020/9/1
Y1 - 2020/9/1
N2 - In this study, we demonstrated a potential usability of a piezoelectric micromachined ultrasonic transducer (pMUT) for a high-performance body-coupled ultrasonic imager based on an epitaxial lead zirconate titanate (Epi-PZT) thin film. A finger vessel biometrics was proposed as one of its applications. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epitaxial-PZT (Epi-PZT) and polycrystalline-PZT (Poly-PZT) were evaluated as a fundamental study. It was experimentally verified that the Epi-PZT was a preferable material for a higher performance pMUT. Then, the linear array driven by a commercially-available pulser board was constructed, and successfully formed a focused ultrasonic beam. Finally, we demonstrated the ultrasonic imaging of a polydimethylsiloxane-based phantom by using the Epi-PZT pMUT array. We believe this achievement is a great step to realize the finger vessel biometric by pMUT.
AB - In this study, we demonstrated a potential usability of a piezoelectric micromachined ultrasonic transducer (pMUT) for a high-performance body-coupled ultrasonic imager based on an epitaxial lead zirconate titanate (Epi-PZT) thin film. A finger vessel biometrics was proposed as one of its applications. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epitaxial-PZT (Epi-PZT) and polycrystalline-PZT (Poly-PZT) were evaluated as a fundamental study. It was experimentally verified that the Epi-PZT was a preferable material for a higher performance pMUT. Then, the linear array driven by a commercially-available pulser board was constructed, and successfully formed a focused ultrasonic beam. Finally, we demonstrated the ultrasonic imaging of a polydimethylsiloxane-based phantom by using the Epi-PZT pMUT array. We believe this achievement is a great step to realize the finger vessel biometric by pMUT.
KW - Beamforming
KW - Epitaxial PZT thin film
KW - pMUT
KW - Ultrasonic image
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U2 - 10.1016/j.sna.2020.112145
DO - 10.1016/j.sna.2020.112145
M3 - Article
AN - SCOPUS:85086798099
SN - 0924-4247
VL - 312
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
M1 - 112145
ER -