Femtosecond laser microfabrication of periodic structures using a microlens array

S. Matsuo; S. Juodkazis; H. Misawa

doi:10.1007/s00339-004-3108-x

Femtosecond laser microfabrication of periodic structures using a microlens array

S. Matsuo, S. Juodkazis, H. Misawa

Research output: Contribution to journal › Review article › peer-review

109 Citations (Scopus)

Abstract

A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

Original language	English
Pages (from-to)	683-685
Number of pages	3
Journal	Applied Physics A: Materials Science and Processing
Volume	80
Issue number	4
DOIs	https://doi.org/10.1007/s00339-004-3108-x
Publication status	Published - 2005 Feb 1
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)

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10.1007/s00339-004-3108-x

Cite this

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title = "Femtosecond laser microfabrication of periodic structures using a microlens array",

abstract = "A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.",

author = "S. Matsuo and S. Juodkazis and H. Misawa",

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AU - Juodkazis, S.

AU - Misawa, H.

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N2 - A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

AB - A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

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U2 - 10.1007/s00339-004-3108-x

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JO - Applied Physics A: Materials Science and Processing

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ER -

Femtosecond laser microfabrication of periodic structures using a microlens array

Abstract

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