Femtosecond laser microfabrication of periodic structures using a microlens array

S. Matsuo, S. Juodkazis, H. Misawa

Research output: Contribution to journalReview articlepeer-review

109 Citations (Scopus)


A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

Original languageEnglish
Pages (from-to)683-685
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Issue number4
Publication statusPublished - 2005 Feb 1
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)


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