| Original language | English |
|---|---|
| Pages (from-to) | 49-59 |
| Journal | Amorphous Insulating Thin Films II., Simposia Proceedings |
| Volume | 46 |
| Publication status | Published - 1995 Jan 1 |
Fluorinated Interlayer Dielectric Films in ULSI Multilevel Inter- connections
Research output: Contribution to journal › Article › peer-review
17
Citations
(Scopus)