Foreword: Advanced metallization for ULSI applications

Research output: Contribution to journal › Editorial › peer-review

Original language	English
Journal	Japanese Journal of Applied Physics
Volume	51
Issue number	5 PART 2
Publication status	Published - 2012 May 1

ASJC Scopus subject areas

@article{c54a32b2892a428595ac1fe2798b95e0,

title = "Foreword: Advanced metallization for ULSI applications",

author = "Kazuyoshi Ueno",

year = "2012",

month = may,

day = "1",

language = "English",

volume = "51",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "5 PART 2",

}

TY - JOUR

T1 - Foreword

T2 - Advanced metallization for ULSI applications

AU - Ueno, Kazuyoshi

PY - 2012/5/1

Y1 - 2012/5/1

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M3 - Editorial

AN - SCOPUS:84861497699

SN - 0021-4922

VL - 51

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 5 PART 2

ER -