Abstract
The formation mechanisms of paramagnetic defect centers in amorphous SiO2 induced by excimer lasers, 60Co γ rays, and mechanical fracturing were investigated. Correlation between the paramagnetic defect centers and their precursors introduced during manufacture is discussed for the cases of excimer lasers and γ rays. For the case of mechanical fracturing, formation of strained Si-O-Si bonds as well as paramagnetic defects is examined. The mechanism of laser- or γ-ray-induced paramagnetic defect centers is compared with that of fracture-induced centers.
Original language | English |
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Pages (from-to) | 9-19 |
Number of pages | 11 |
Journal | Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi) |
Volume | 121 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1997 Jan 1 |
Externally published | Yes |
Keywords
- Amorphous SiO
- Electron spin resonance
- Excimer laser: Co γ ray
- Mechanical stress
- Optical absorption
- Paramagnetic defect center
ASJC Scopus subject areas
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering