Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka; M. Shimojo; M. Takeguchi; K. Mitsuishi; K. Furuya

doi:10.1016/j.jcrysgro.2004.11.337

Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, M. Shimojo, M. Takeguchi, K. Mitsuishi, K. Furuya

Research output: Contribution to journal › Conference article › peer-review

11 Citations (Scopus)

Abstract

We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.

Original language	English
Pages (from-to)	e2361-e2366
Journal	Journal of Crystal Growth
Volume	275
Issue number	1-2
DOIs	https://doi.org/10.1016/j.jcrysgro.2004.11.337
Publication status	Published - 2005 Feb 15
Externally published	Yes

Keywords

A1. Characterization
A3. Metalorganic chemical vapor deposition
B1. Nanomaterials

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

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10.1016/j.jcrysgro.2004.11.337

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title = "Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope",

abstract = "We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.",

keywords = "A1. Characterization, A3. Metalorganic chemical vapor deposition, B1. Nanomaterials",

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T1 - Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

AU - Tanaka, M.

AU - Shimojo, M.

AU - Takeguchi, M.

AU - Mitsuishi, K.

AU - Furuya, K.

PY - 2005/2/15

Y1 - 2005/2/15

N2 - We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.

AB - We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.

KW - A1. Characterization

KW - A3. Metalorganic chemical vapor deposition

KW - B1. Nanomaterials

UR - http://www.scopus.com/inward/record.url?scp=15844393473&partnerID=8YFLogxK

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DO - 10.1016/j.jcrysgro.2004.11.337

M3 - Conference article

AN - SCOPUS:15844393473

SN - 0022-0248

VL - 275

SP - e2361-e2366

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-2

ER -

Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

Abstract

Keywords

ASJC Scopus subject areas

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