Hands-on-access fabrication facility for MEMS Development and production

Kentaro Totsu, Masaaki Moriyama, Yukio Suzuki, Takahito Ono, Shinya Yoshida, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We offer a hands-on-access fabrication facility for MEMS and semiconductor research and development. The facility is located at Jun-ichi Nishizawa Memorial Research Center, Tohoku University, and started in 2010. The principle is an open access that users can utilize the fab and operate the equipment by themselves. Users also can access a great deal of know-how accumulated at Tohoku University. Over 120 companies have utilized the fab for developing various devices, such as an accelerometer, a pressure sensor, a photo diode, a radiation sensor, a solar cell and a microphone. To accelerate University's R&D and education, product fabrication by a company user is started in July 2013.

Original languageEnglish
Title of host publication20th International Display Workshops 2013, IDW 2013
PublisherInternational Display Workshops
Number of pages4
ISBN (Electronic)9781510827783
Publication statusPublished - 2013
Externally publishedYes
Event20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan
Duration: 2013 Dec 32013 Dec 6

Publication series

NameProceedings of the International Display Workshops
ISSN (Print)1883-2490


Conference20th International Display Workshops 2013, IDW 2013


  • Epitaxial poly-Si
  • Fabless
  • Low-stress CVD
  • Open access
  • PZT

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging


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