TY - GEN
T1 - Hands-on-access fabrication facility for MEMS Development and production
AU - Totsu, Kentaro
AU - Moriyama, Masaaki
AU - Suzuki, Yukio
AU - Ono, Takahito
AU - Yoshida, Shinya
AU - Esashi, Masayoshi
N1 - Funding Information:
This project is supported by the Japan Society for the Promotion of Science (JSPS) through its "Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program)."
Publisher Copyright:
© 2013 ITE and SID.
PY - 2013
Y1 - 2013
N2 - We offer a hands-on-access fabrication facility for MEMS and semiconductor research and development. The facility is located at Jun-ichi Nishizawa Memorial Research Center, Tohoku University, and started in 2010. The principle is an open access that users can utilize the fab and operate the equipment by themselves. Users also can access a great deal of know-how accumulated at Tohoku University. Over 120 companies have utilized the fab for developing various devices, such as an accelerometer, a pressure sensor, a photo diode, a radiation sensor, a solar cell and a microphone. To accelerate University's R&D and education, product fabrication by a company user is started in July 2013.
AB - We offer a hands-on-access fabrication facility for MEMS and semiconductor research and development. The facility is located at Jun-ichi Nishizawa Memorial Research Center, Tohoku University, and started in 2010. The principle is an open access that users can utilize the fab and operate the equipment by themselves. Users also can access a great deal of know-how accumulated at Tohoku University. Over 120 companies have utilized the fab for developing various devices, such as an accelerometer, a pressure sensor, a photo diode, a radiation sensor, a solar cell and a microphone. To accelerate University's R&D and education, product fabrication by a company user is started in July 2013.
KW - Epitaxial poly-Si
KW - Fabless
KW - Low-stress CVD
KW - Open access
KW - PZT
UR - http://www.scopus.com/inward/record.url?scp=85026197322&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85026197322&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85026197322
T3 - Proceedings of the International Display Workshops
SP - 1405
EP - 1408
BT - 20th International Display Workshops 2013, IDW 2013
PB - International Display Workshops
T2 - 20th International Display Workshops 2013, IDW 2013
Y2 - 3 December 2013 through 6 December 2013
ER -