High precision adaptive control for piezo-actuated stage

Xinkai Chen; Toshikuni Ozaki

doi:10.1109/ROBIO.2010.5723541

High precision adaptive control for piezo-actuated stage

Xinkai Chen, Toshikuni Ozaki

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original language	English
Title of host publication	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Pages	1440-1445
Number of pages	6
DOIs	https://doi.org/10.1109/ROBIO.2010.5723541
Publication status	Published - 2010 Dec 1
Event	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 - Tianjin, China Duration: 2010 Dec 14 → 2010 Dec 18

Publication series

Name	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010

Conference

Conference	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Country/Territory	China
City	Tianjin
Period	10/12/14 → 10/12/18

ASJC Scopus subject areas

Artificial Intelligence
Biotechnology
Human-Computer Interaction

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10.1109/ROBIO.2010.5723541

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Chen, X & Ozaki, T 2010, High precision adaptive control for piezo-actuated stage. in 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010., 5723541, 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010, pp. 1440-1445, 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010, Tianjin, China, 10/12/14. https://doi.org/10.1109/ROBIO.2010.5723541

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title = "High precision adaptive control for piezo-actuated stage",

abstract = "The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.",

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AB - The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

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High precision adaptive control for piezo-actuated stage

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