TY - GEN
T1 - High precision control for piezo-actuated XY-table
AU - Chen, Xinkai
PY - 2012/12/1
Y1 - 2012/12/1
N2 - The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
AB - The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=84876466776&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84876466776&partnerID=8YFLogxK
U2 - 10.1109/ROBIO.2012.6491326
DO - 10.1109/ROBIO.2012.6491326
M3 - Conference contribution
AN - SCOPUS:84876466776
SN - 9781467321273
T3 - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
SP - 2381
EP - 2386
BT - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
T2 - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012
Y2 - 11 December 2012 through 14 December 2012
ER -