TY - GEN
T1 - High precision control of the piezo-actuated stage
AU - Ozaki, Toshikuni
AU - Chen, Xinkai
PY - 2010/10/18
Y1 - 2010/10/18
N2 - The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.
AB - The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=77957841042&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77957841042&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:77957841042
SN - 9780955529337
T3 - 2010 International Conference on Modelling, Identification and Control, ICMIC 2010
SP - 376
EP - 381
BT - 2010 International Conference on Modelling, Identification and Control, ICMIC 2010
T2 - 2010 International Conference on Modelling, Identification and Control, ICMIC 2010
Y2 - 17 July 2010 through 19 July 2010
ER -