High-Quality GaN Growth on AlN/Sapphire Templates by MOVPE

M. Sakai, H. Ishikawa, T. Egawa, T. Jimbo, M. Umeno, T. Shibata, K. Asai, S. Sumiya, Y. Kuraoka?2?

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)783-788
JournalInst. Phys. Conf. Ser.
Publication statusPublished - 2002 Jan 1

Cite this