Higher-k LaYOx films with strong moisture resistance

Yi Zhao; Koji Kita; Kentaro Kyuno; Akira Toriumi

doi:10.1063/1.2420794

Higher-k LaYO_x films with strong moisture resistance

Yi Zhao, Koji Kita, Kentaro Kyuno, Akira Toriumi

Research output: Contribution to journal › Article › peer-review

72 Citations (Scopus)

Abstract

The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

Original language	English
Article number	252905
Journal	Applied Physics Letters
Volume	89
Issue number	25
DOIs	https://doi.org/10.1063/1.2420794
Publication status	Published - 2006
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.2420794

Cite this

@article{0d3a0656d8314e00bb729db6d5a6fca2,

title = "Higher-k LaYOx films with strong moisture resistance",

abstract = "The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.",

author = "Yi Zhao and Koji Kita and Kentaro Kyuno and Akira Toriumi",

note = "Funding Information: This work was partly supported by a Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology in Japan, and NEDO/MIRAI project.",

year = "2006",

doi = "10.1063/1.2420794",

language = "English",

volume = "89",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "25",

}

TY - JOUR

T1 - Higher-k LaYOx films with strong moisture resistance

AU - Zhao, Yi

AU - Kita, Koji

AU - Kyuno, Kentaro

AU - Toriumi, Akira

N1 - Funding Information: This work was partly supported by a Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology in Japan, and NEDO/MIRAI project.

PY - 2006

Y1 - 2006

N2 - The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

AB - The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

UR - http://www.scopus.com/inward/record.url?scp=33845946419&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33845946419&partnerID=8YFLogxK

U2 - 10.1063/1.2420794

DO - 10.1063/1.2420794

M3 - Article

AN - SCOPUS:33845946419

SN - 0003-6951

VL - 89

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 25

M1 - 252905

ER -

Higher-k LaYO_x films with strong moisture resistance

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this