Higher-k LaYOx films with strong moisture-robustness

Yi Zhao; Koji Kita; Kentaro Kyuno; Akira Toriumi

doi:10.1109/ICSICT.2006.306291

Higher-k LaYOx films with strong moisture-robustness

Yi Zhao, Koji Kita, Kentaro Kyuno, Akira Toriumi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The permittivities and the resistance to moisture of LaYO_x (LYO) films annealed at 600°C with different Y concentrations are investigated. The permittivities of 40%Y-LYO film and 70%Y-LYO film are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LYO films. For rare earth oxides, the hexagonal phase shows higher permittivity than the cubic phase due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LYO films (40%Y-LYO and 70%Y-LYO) show strong resistance to the moisture due to the introduction Of Y₂O ₃ which owns stronger resistance to the moisture than La ₂O₃.

Original language	English
Title of host publication	ICSICT-2006
Subtitle of host publication	2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
Publisher	IEEE Computer Society
Pages	427-429
Number of pages	3
ISBN (Print)	1424401615, 9781424401611
DOIs	https://doi.org/10.1109/ICSICT.2006.306291
Publication status	Published - 2006
Externally published	Yes
Event	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology - Shanghai, China Duration: 2006 Oct 23 → 2006 Oct 26

Publication series

Name	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Conference

Conference	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology
Country/Territory	China
City	Shanghai
Period	06/10/23 → 06/10/26

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSICT.2006.306291

Cite this

Zhao, Y., Kita, K., Kyuno, K., & Toriumi, A. (2006). Higher-k LaYOx films with strong moisture-robustness. In ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings (pp. 427-429). Article 4098126 (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings). IEEE Computer Society. https://doi.org/10.1109/ICSICT.2006.306291

Higher-k LaYOx films with strong moisture-robustness. / Zhao, Yi; Kita, Koji; Kyuno, Kentaro et al.
ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society, 2006. p. 427-429 4098126 (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhao, Y, Kita, K, Kyuno, K & Toriumi, A 2006, Higher-k LaYOx films with strong moisture-robustness. in ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings., 4098126, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings, IEEE Computer Society, pp. 427-429, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, 06/10/23. https://doi.org/10.1109/ICSICT.2006.306291

Zhao Y, Kita K, Kyuno K, Toriumi A. Higher-k LaYOx films with strong moisture-robustness. In ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society. 2006. p. 427-429. 4098126. (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings). doi: 10.1109/ICSICT.2006.306291

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title = "Higher-k LaYOx films with strong moisture-robustness",

abstract = "The permittivities and the resistance to moisture of LaYOx (LYO) films annealed at 600°C with different Y concentrations are investigated. The permittivities of 40%Y-LYO film and 70%Y-LYO film are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LYO films. For rare earth oxides, the hexagonal phase shows higher permittivity than the cubic phase due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LYO films (40%Y-LYO and 70%Y-LYO) show strong resistance to the moisture due to the introduction Of Y2O 3 which owns stronger resistance to the moisture than La 2O3.",

author = "Yi Zhao and Koji Kita and Kentaro Kyuno and Akira Toriumi",

year = "2006",

doi = "10.1109/ICSICT.2006.306291",

language = "English",

isbn = "1424401615",

series = "ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings",

publisher = "IEEE Computer Society",

pages = "427--429",

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note = "ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology ; Conference date: 23-10-2006 Through 26-10-2006",

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AU - Zhao, Yi

AU - Kita, Koji

AU - Kyuno, Kentaro

AU - Toriumi, Akira

PY - 2006

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N2 - The permittivities and the resistance to moisture of LaYOx (LYO) films annealed at 600°C with different Y concentrations are investigated. The permittivities of 40%Y-LYO film and 70%Y-LYO film are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LYO films. For rare earth oxides, the hexagonal phase shows higher permittivity than the cubic phase due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LYO films (40%Y-LYO and 70%Y-LYO) show strong resistance to the moisture due to the introduction Of Y2O 3 which owns stronger resistance to the moisture than La 2O3.

AB - The permittivities and the resistance to moisture of LaYOx (LYO) films annealed at 600°C with different Y concentrations are investigated. The permittivities of 40%Y-LYO film and 70%Y-LYO film are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LYO films. For rare earth oxides, the hexagonal phase shows higher permittivity than the cubic phase due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LYO films (40%Y-LYO and 70%Y-LYO) show strong resistance to the moisture due to the introduction Of Y2O 3 which owns stronger resistance to the moisture than La 2O3.

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SN - 9781424401611

T3 - ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

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Y2 - 23 October 2006 through 26 October 2006

ER -

Higher-k LaYOx films with strong moisture-robustness

Abstract

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