Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy

K. Mitsuishi; A. Hashimoto; M. Takeguchi; M. Shimojo; K. Ishizuka

doi:10.1016/j.ultramic.2010.08.004

Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy

K. Mitsuishi, A. Hashimoto, M. Takeguchi, M. Shimojo, K. Ishizuka

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.

Original language	English
Pages (from-to)	20-26
Number of pages	7
Journal	Ultramicroscopy
Volume	111
Issue number	1
DOIs	https://doi.org/10.1016/j.ultramic.2010.08.004
Publication status	Published - 2010 Dec
Externally published	Yes

Keywords

3D STEM
Confocal STEM
Confocal electron microscopy
Image simulation
Multislice method
Optical sectioning
SCEM

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

Access to Document

10.1016/j.ultramic.2010.08.004

Cite this

@article{eb46660dd9c244dd8a5b2608085df859,

title = "Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy",

abstract = "Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.",

keywords = "3D STEM, Confocal STEM, Confocal electron microscopy, Image simulation, Multislice method, Optical sectioning, SCEM",

author = "K. Mitsuishi and A. Hashimoto and M. Takeguchi and M. Shimojo and K. Ishizuka",

note = "Funding Information: This research was partially supported by a Grant-in-Aid for Scientific Research (C) ( 21560036 ) and a Grant-in-Aid for Young Scientists (B) ( 20760027 ) from the Japan Society for the Promotion of Science, Japan, and also partially supported by the Nuclear Research Project of Ministry of Education, Science, Sports and Culture (MEXT).",

year = "2010",

month = dec,

doi = "10.1016/j.ultramic.2010.08.004",

language = "English",

volume = "111",

pages = "20--26",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy

AU - Mitsuishi, K.

AU - Hashimoto, A.

AU - Takeguchi, M.

AU - Shimojo, M.

AU - Ishizuka, K.

N1 - Funding Information: This research was partially supported by a Grant-in-Aid for Scientific Research (C) ( 21560036 ) and a Grant-in-Aid for Young Scientists (B) ( 20760027 ) from the Japan Society for the Promotion of Science, Japan, and also partially supported by the Nuclear Research Project of Ministry of Education, Science, Sports and Culture (MEXT).

PY - 2010/12

Y1 - 2010/12

N2 - Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.

AB - Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.

KW - 3D STEM

KW - Confocal STEM

KW - Confocal electron microscopy

KW - Image simulation

KW - Multislice method

KW - Optical sectioning

KW - SCEM

UR - http://www.scopus.com/inward/record.url?scp=78149274917&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78149274917&partnerID=8YFLogxK

U2 - 10.1016/j.ultramic.2010.08.004

DO - 10.1016/j.ultramic.2010.08.004

M3 - Article

C2 - 21111263

AN - SCOPUS:78149274917

SN - 0304-3991

VL - 111

SP - 20

EP - 26

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 1

ER -

Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this