Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution

X. Zhang; X. Zhang;M.Takeguchi;A.Hashimoto;K.Mitsuishi;M.Tezuka Shimojo

Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution

X. Zhang, X. Zhang;M.Takeguchi;A.Hashimoto;K.Mitsuishi;M.Tezuka Shimojo

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	603-611
Journal	Microsc. Microanal.
Volume	18
Publication status	Published - 2012 Dec 1

Cite this

@article{6b9d74b687af4ef7b4617001ed2521b9,

title = "Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution",

author = "X. Zhang and Shimojo, {X. Zhang;M.Takeguchi;A.Hashimoto;K.Mitsuishi;M.Tezuka}",

year = "2012",

month = dec,

day = "1",

language = "English",

volume = "18",

pages = "603--611",

journal = "Microsc. Microanal.",

}