In-situ ion and electron beam effects on the fabrication and analysis of nanomaterials

Kazuo Furuya; Minghui Song; Masayuki Shimojo

doi:10.1007/9789812797346_0007

In-situ ion and electron beam effects on the fabrication and analysis of nanomaterials

Kazuo Furuya, Minghui Song, Masayuki Shimojo

Research output: Chapter in Book/Report/Conference proceeding › Chapter

1 Citation (Scopus)

Abstract

Ion implantation causes the formation of nano-phases as well as radiation damage. “In-situ” observation in a TEM is a unique technique to clarify such phenomena. One example is Xe nanocrystals embedded in a metal matrix. HRTEM observations revealed the atomic structures and the motion of atoms in a Xe nanocrystal. Electron beam-induced deposition is another technique to fabricate nano-structures. Nanostructures having desired shape and size can be obtained. Metal atoms are deposited using focused electron beam irradiation under the presence of a small amount of precursor gas molecules on the substrate. The details of these ion and electron beam effects are reviewed.

Original language	English
Title of host publication	In-Situ Electron Microscopy at High Resolution
Publisher	World Scientific Publishing Co.
Pages	229-258
Number of pages	30
ISBN (Electronic)	9789812797346
ISBN (Print)	9812797335, 9789812797339
DOIs	https://doi.org/10.1007/9789812797346_0007
Publication status	Published - 2008 Jan 1
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Materials Science(all)

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10.1007/9789812797346_0007

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title = "In-situ ion and electron beam effects on the fabrication and analysis of nanomaterials",

abstract = "Ion implantation causes the formation of nano-phases as well as radiation damage. “In-situ” observation in a TEM is a unique technique to clarify such phenomena. One example is Xe nanocrystals embedded in a metal matrix. HRTEM observations revealed the atomic structures and the motion of atoms in a Xe nanocrystal. Electron beam-induced deposition is another technique to fabricate nano-structures. Nanostructures having desired shape and size can be obtained. Metal atoms are deposited using focused electron beam irradiation under the presence of a small amount of precursor gas molecules on the substrate. The details of these ion and electron beam effects are reviewed.",

author = "Kazuo Furuya and Minghui Song and Masayuki Shimojo",

note = "Funding Information: The article presents the principle of operation, design method, and results of laboratory and simulation tests of a 24-pulse power network converter system with direct-current voltage output, the concept and practical realisation of which was worked out within the framework of a research project financed by the State Committee for Scientific Research. The paper concerns the up-to-date topic of power-electronic conversion of alternating current power drawn from a supply line, without any negative effect of a converter on this line. The presented converter allows significant reduction of undesirable higher harmonics in the power network current, including the elimination of harmonics of orders of 23 and 25. The 24-pulse nature of operation of the system is obtained using three sets of coupled three-phase power network reactors (CTR). Publisher Copyright: {\textcopyright} 2008 by World Scientific Publishing Co. Pte. Ltd. All rights reserved.",

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doi = "10.1007/9789812797346_0007",

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AU - Furuya, Kazuo

AU - Song, Minghui

AU - Shimojo, Masayuki

N1 - Funding Information: The article presents the principle of operation, design method, and results of laboratory and simulation tests of a 24-pulse power network converter system with direct-current voltage output, the concept and practical realisation of which was worked out within the framework of a research project financed by the State Committee for Scientific Research. The paper concerns the up-to-date topic of power-electronic conversion of alternating current power drawn from a supply line, without any negative effect of a converter on this line. The presented converter allows significant reduction of undesirable higher harmonics in the power network current, including the elimination of harmonics of orders of 23 and 25. The 24-pulse nature of operation of the system is obtained using three sets of coupled three-phase power network reactors (CTR). Publisher Copyright: © 2008 by World Scientific Publishing Co. Pte. Ltd. All rights reserved.

PY - 2008/1/1

Y1 - 2008/1/1

N2 - Ion implantation causes the formation of nano-phases as well as radiation damage. “In-situ” observation in a TEM is a unique technique to clarify such phenomena. One example is Xe nanocrystals embedded in a metal matrix. HRTEM observations revealed the atomic structures and the motion of atoms in a Xe nanocrystal. Electron beam-induced deposition is another technique to fabricate nano-structures. Nanostructures having desired shape and size can be obtained. Metal atoms are deposited using focused electron beam irradiation under the presence of a small amount of precursor gas molecules on the substrate. The details of these ion and electron beam effects are reviewed.

AB - Ion implantation causes the formation of nano-phases as well as radiation damage. “In-situ” observation in a TEM is a unique technique to clarify such phenomena. One example is Xe nanocrystals embedded in a metal matrix. HRTEM observations revealed the atomic structures and the motion of atoms in a Xe nanocrystal. Electron beam-induced deposition is another technique to fabricate nano-structures. Nanostructures having desired shape and size can be obtained. Metal atoms are deposited using focused electron beam irradiation under the presence of a small amount of precursor gas molecules on the substrate. The details of these ion and electron beam effects are reviewed.

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EP - 258

BT - In-Situ Electron Microscopy at High Resolution

PB - World Scientific Publishing Co.

ER -

In-situ ion and electron beam effects on the fabrication and analysis of nanomaterials

Abstract

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