| Original language | English |
|---|---|
| Journal | 2004 MRS Spring Meeting |
| Publication status | Published - 2004 Apr 1 |
IR Absorption Study of HfO2 and HfO2/Si Interface Ranging from 200cm-1 to 2000cm-1
K. Tomida, H. Shimizu, K. Kita, K. Kyuno, A. Toriumi
Research output: Contribution to journal › Article › peer-review