Laser beam lithographed micro-Fresnel lenses

Masamitsu Haruna; Masanobu Takahashi; Kohji Wakabayashi; Hiroshi Nishihara

doi:https://doi.org/10.1364/AO.29.005120

Laser beam lithographed micro-Fresnel lenses

Masamitsu Haruna, Masanobu Takahashi, Kohji Wakabayashi, Hiroshi Nishihara

Research output: Contribution to journal › Article › peer-review

Abstract

Laser beam lithography for micro-Fresnel lenses (MFLs) with blazed grooves is proposed and demonstrated including the system configuration and characteristics of the resulting lenses. The resolution is even better than that of electron-beam lithography in forming 1-μm deep relief gratings in resist. A laser beam lithographed MFL with a diameter as large as 9.6 mm is described as well as a compact MFL (N.A. 0.21) butt coupled to an optical waveguide. In these two distinct MFLs, nearly diffraction-limited spot sizes have been obtained with diffraction efficiencies of 50% or more. A specific MFL array used for an integrated optic laser Doppler velocimeter is also presented.

Original language	English
Pages (from-to)	5120-5126
Journal	Applied Optics
Volume	29
Issue number	34
DOIs	https://doi.org/10.1364/AO.29.005120
Publication status	Published - 1990 Dec 1

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title = "Laser beam lithographed micro-Fresnel lenses",

abstract = "Laser beam lithography for micro-Fresnel lenses (MFLs) with blazed grooves is proposed and demonstrated including the system configuration and characteristics of the resulting lenses. The resolution is even better than that of electron-beam lithography in forming 1-μm deep relief gratings in resist. A laser beam lithographed MFL with a diameter as large as 9.6 mm is described as well as a compact MFL (N.A. 0.21) butt coupled to an optical waveguide. In these two distinct MFLs, nearly diffraction-limited spot sizes have been obtained with diffraction efficiencies of 50% or more. A specific MFL array used for an integrated optic laser Doppler velocimeter is also presented.",

author = "Masamitsu Haruna and Masanobu Takahashi and Kohji Wakabayashi and Hiroshi Nishihara",

year = "1990",

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doi = "https://doi.org/10.1364/AO.29.005120",

language = "English",

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journal = "Applied Optics",

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T1 - Laser beam lithographed micro-Fresnel lenses

AU - Haruna, Masamitsu

AU - Takahashi, Masanobu

AU - Wakabayashi, Kohji

AU - Nishihara, Hiroshi

PY - 1990/12/1

Y1 - 1990/12/1

N2 - Laser beam lithography for micro-Fresnel lenses (MFLs) with blazed grooves is proposed and demonstrated including the system configuration and characteristics of the resulting lenses. The resolution is even better than that of electron-beam lithography in forming 1-μm deep relief gratings in resist. A laser beam lithographed MFL with a diameter as large as 9.6 mm is described as well as a compact MFL (N.A. 0.21) butt coupled to an optical waveguide. In these two distinct MFLs, nearly diffraction-limited spot sizes have been obtained with diffraction efficiencies of 50% or more. A specific MFL array used for an integrated optic laser Doppler velocimeter is also presented.

AB - Laser beam lithography for micro-Fresnel lenses (MFLs) with blazed grooves is proposed and demonstrated including the system configuration and characteristics of the resulting lenses. The resolution is even better than that of electron-beam lithography in forming 1-μm deep relief gratings in resist. A laser beam lithographed MFL with a diameter as large as 9.6 mm is described as well as a compact MFL (N.A. 0.21) butt coupled to an optical waveguide. In these two distinct MFLs, nearly diffraction-limited spot sizes have been obtained with diffraction efficiencies of 50% or more. A specific MFL array used for an integrated optic laser Doppler velocimeter is also presented.

U2 - https://doi.org/10.1364/AO.29.005120

DO - https://doi.org/10.1364/AO.29.005120

M3 - Article

SN - 0003-6935

VL - 29

SP - 5120

EP - 5126

JO - Applied Optics

JF - Applied Optics

IS - 34

ER -

Laser beam lithographed micro-Fresnel lenses

Abstract

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