@inproceedings{be4e892db9f94ea8acd1a12b65008b2c,
title = "Laser internal modification plus wet etching for micro-structuring crystalline and glassy materials",
abstract = "The development of fs laser technology has enabled the internal modification of transparent solid materials, performed by focusing femtosecond (fs) pulses. Using internal modification and subsequent wet etching, micrometer-scale removal processing with arbitrary three-dimensional design was enabled. We applied this technique to transparent nonphotosensitive crystalline and glassy materials. This is a unique processing technique almost impossible by other techniques.",
author = "Shigeki Matsuo",
year = "2009",
month = jan,
day = "1",
doi = "10.2351/1.5061669",
language = "English",
isbn = "9780912035598",
series = "ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings",
publisher = "Laser Institute of America",
pages = "942--945",
booktitle = "ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings",
address = "United States",
note = "28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009 ; Conference date: 02-11-2009 Through 05-11-2009",
}