FingerprintDive into the research topics of 'Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures'. Together they form a unique fingerprint.
- Sort by
H. Nishikawa, Y. Furuta, N. Uchiya, J. Haga, M. Oikawa, T. Satoh, Y. Ishii, T. Kamiya
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution