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Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures
H. Nishikawa, Y. Furuta, N. Uchiya, J. Haga, M. Oikawa, T. Satoh, Y. Ishii, T. Kamiya
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)