Maskless micropatterning of electrochromic nanoparticles using a focused electron beam

Yuki Katori; Yusuke Suzaka; Masayuki Shimojo

doi:10.1116/1.5080754

Maskless micropatterning of electrochromic nanoparticles using a focused electron beam

Yuki Katori, Yusuke Suzaka, Masayuki Shimojo

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Optical properties of electrochromic (EC) materials can be reversibly changed under applied voltages through electrochemical redox reactions. Prussian blue (PB) is a well-known EC material that changes color from blue to colorless and transparent, and vice versa. Fine patterning of PB particles on a transparent substrate could lead to the development of a high-quality display device with very low energy consumption. In this paper, a maskless patterning technique using a focused electron beam is described, and the effects of the accelerating voltage and the electron dose are studied. The results show that the micropatterning of PB particles is achieved at an accelerating voltage of 5 kV and at electron doses of 10-100 C/m². Reversible changes in color were observed between blue and colorless-transparent after the patterning of PB particles.

Original language	English
Article number	031204
Journal	Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume	37
Issue number	3
DOIs	https://doi.org/10.1116/1.5080754
Publication status	Published - 2019 May 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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10.1116/1.5080754

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@article{7a4dd6d83be942edaeef5c1b4a5b78e8,

title = "Maskless micropatterning of electrochromic nanoparticles using a focused electron beam",

abstract = "Optical properties of electrochromic (EC) materials can be reversibly changed under applied voltages through electrochemical redox reactions. Prussian blue (PB) is a well-known EC material that changes color from blue to colorless and transparent, and vice versa. Fine patterning of PB particles on a transparent substrate could lead to the development of a high-quality display device with very low energy consumption. In this paper, a maskless patterning technique using a focused electron beam is described, and the effects of the accelerating voltage and the electron dose are studied. The results show that the micropatterning of PB particles is achieved at an accelerating voltage of 5 kV and at electron doses of 10-100 C/m2. Reversible changes in color were observed between blue and colorless-transparent after the patterning of PB particles.",

author = "Yuki Katori and Yusuke Suzaka and Masayuki Shimojo",

note = "Funding Information: This work was partly supported by the JSPS KAKENHI (Grant No. 16K04903). Publisher Copyright: {\textcopyright} 2019 Author(s).",

year = "2019",

month = may,

day = "1",

doi = "10.1116/1.5080754",

language = "English",

volume = "37",

journal = "Journal of Vacuum Science and Technology B",

issn = "2166-2746",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - Maskless micropatterning of electrochromic nanoparticles using a focused electron beam

AU - Katori, Yuki

AU - Suzaka, Yusuke

AU - Shimojo, Masayuki

PY - 2019/5/1

Y1 - 2019/5/1

N2 - Optical properties of electrochromic (EC) materials can be reversibly changed under applied voltages through electrochemical redox reactions. Prussian blue (PB) is a well-known EC material that changes color from blue to colorless and transparent, and vice versa. Fine patterning of PB particles on a transparent substrate could lead to the development of a high-quality display device with very low energy consumption. In this paper, a maskless patterning technique using a focused electron beam is described, and the effects of the accelerating voltage and the electron dose are studied. The results show that the micropatterning of PB particles is achieved at an accelerating voltage of 5 kV and at electron doses of 10-100 C/m2. Reversible changes in color were observed between blue and colorless-transparent after the patterning of PB particles.

AB - Optical properties of electrochromic (EC) materials can be reversibly changed under applied voltages through electrochemical redox reactions. Prussian blue (PB) is a well-known EC material that changes color from blue to colorless and transparent, and vice versa. Fine patterning of PB particles on a transparent substrate could lead to the development of a high-quality display device with very low energy consumption. In this paper, a maskless patterning technique using a focused electron beam is described, and the effects of the accelerating voltage and the electron dose are studied. The results show that the micropatterning of PB particles is achieved at an accelerating voltage of 5 kV and at electron doses of 10-100 C/m2. Reversible changes in color were observed between blue and colorless-transparent after the patterning of PB particles.

UR - http://www.scopus.com/inward/record.url?scp=85064159956&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85064159956&partnerID=8YFLogxK

U2 - 10.1116/1.5080754

DO - 10.1116/1.5080754

M3 - Article

AN - SCOPUS:85064159956

SN - 2166-2746

VL - 37

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

IS - 3

M1 - 031204

ER -

Maskless micropatterning of electrochromic nanoparticles using a focused electron beam

Abstract

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