TY - GEN
T1 - Mass flow sensor using dual SAW device
AU - Nomura, Tooru
AU - Saitoh, Atushi
AU - Koyama, Koichi
PY - 2007/12/1
Y1 - 2007/12/1
N2 - The application of SAW devices to a thermometric mass flow rate meter with a reference channel for temperature compensation is presented. The sensor is composed of a delay line device with two channels, namely a reference channel that does not come in contact with the fluid and a sensing channel that makes contact with the fluid. The mass flow rate of gases can be obtained by measuring the temperature change of the device caused by drawing heat from the surface with constant temperature due to the fluid. The results obtained from flow rate measurements of several gases demonstrate that the proposed device is effective as a flow rate meter. Moreover, it is also shown that the response characteristics to mass flow rate changes and the response stability for fluids were improved by taking the phase difference between the signals of the reference channel and the sensing channel as the gas flow rate.
AB - The application of SAW devices to a thermometric mass flow rate meter with a reference channel for temperature compensation is presented. The sensor is composed of a delay line device with two channels, namely a reference channel that does not come in contact with the fluid and a sensing channel that makes contact with the fluid. The mass flow rate of gases can be obtained by measuring the temperature change of the device caused by drawing heat from the surface with constant temperature due to the fluid. The results obtained from flow rate measurements of several gases demonstrate that the proposed device is effective as a flow rate meter. Moreover, it is also shown that the response characteristics to mass flow rate changes and the response stability for fluids were improved by taking the phase difference between the signals of the reference channel and the sensing channel as the gas flow rate.
UR - http://www.scopus.com/inward/record.url?scp=51049112026&partnerID=8YFLogxK
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U2 - 10.1109/FREQ.2007.4319023
DO - 10.1109/FREQ.2007.4319023
M3 - Conference contribution
AN - SCOPUS:51049112026
SN - 1424406463
SN - 9781424406463
T3 - Proceedings of the IEEE International Frequency Control Symposium and Exposition
SP - 25
EP - 30
BT - 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS
T2 - 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS
Y2 - 29 May 2007 through 1 June 2007
ER -