Abstract
A new liquid sensor using multi-mode surface acoustic wave (SAW) delay lines is described. SAW having shear horizontal (SH) displacement and Rayleigh (R) mode SAW have been used for measuring the acoustic properties of liquid. A special feature of the sensor is that the SH-SAW and R-SAW delay line are constructed in one substrate. A each mode SAW delay line were constructed on one 36° YX LiNbO3 substrate. The SH-SAW was excited on the X direction and the R-SAW was excited on the direction at 90° to X on the substrate. The measurements were performed for water/glycerol solution. The experimental results show that the attenuation of the SH- and R-SAW are proportional to the viscosity and the density of the loaded solution, respectively. These results indicate that the SH-SAW and R-SAW are very suitable for measuring the acoustic properties of liquid.
Original language | English |
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Pages (from-to) | 645-651 |
Number of pages | 7 |
Journal | Proceedings of the Annual IEEE International Frequency Control Symposium |
Publication status | Published - 1998 Dec 1 |
Event | Proceedings of the 1998 IEEE International Frequency Control Symposium - Pasadena, CA, USA Duration: 1998 May 27 → 1998 May 29 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering