Mechanical properties of zirconium films prepared by ion-beam assisted deposition

A. Mitsuo, T. Mori, Y. Setsuhara, S. Miyake, T. Aizawa

Research output: Contribution to journalConference articlepeer-review

25 Citations (Scopus)


Zirconium nitride films were prepared by ion-beam assisted deposition on single-crystal silicon substrates. The films were synthesized by depositing the zirconium vapor from an electron-beam source, under the irradiation of nitrogen ions from an arc ion source. Transport ratio of Zr to N was varied from 1.0 to 3.0 by controlling the deposition rate of Zr. The ion beam density was kept constant, 0.2 mA/cm2. The ion beam energy was varied between 0.5 and 2.0 keV. The films were characterized by X-ray diffraction (XRD) and Auger electron spectroscopy. Hardness of the films was measured by the nano-indentation tester. The tribological behavior of films was evaluated by the ball-and-disk tribometer, under the normal load of 2 N and the relative sliding speed of 10 mm/s. The steel balls were used as a counter material. Formation of ZrN was recognized in XRD pattern for all deposition conditions. Depth profiles measured by X-ray photoelectron spectroscopy showed that the composition ratio of Zr to N was uniform in the inside of film. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films are also discussed.

Original languageEnglish
Pages (from-to)366-370
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - 2003 May
Externally publishedYes
Event13th International conference on Ion beam modification of Mate - Kobe, Japan
Duration: 2002 Sept 12002 Sept 6


  • Friction coefficient
  • Hardness
  • Ion beam assisted deposition
  • Thin film
  • Zirconium
  • Zirconium nitride

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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