MEMS Electric Power Generator Using a Piezoelectric PZT Thin Film Cantilever

Shinya Ishikawa, Kazumasa Shibata, Katsuhiro Tanaka, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	265-268
Journal	Proceedings of PowerMEMS2008+μEMS2008
Publication status	Published - 2008 Apr 1

Cite this

@article{ca5adb8fba37440fad74e8b4a15ff07b,

title = "MEMS Electric Power Generator Using a Piezoelectric PZT Thin Film Cantilever",

author = "Shinya Ishikawa and Kazumasa Shibata and Katsuhiro Tanaka and Sumito Nagasawa and Hiroki Kuwano",

year = "2008",

month = apr,

day = "1",

language = "English",

pages = "265--268",

journal = "Proceedings of PowerMEMS2008+μEMS2008",

}