Micro Electric Power Generation Using A Micro Cantilever with PZT Thin Film

Kazumasa Shibata, Hiroki Kuwano, Sumito Nagasawa, Katsuhiro Tanaka

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	13
Journal	Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication status	Published - 2007 Apr 1

Cite this

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title = "Micro Electric Power Generation Using A Micro Cantilever with PZT Thin Film",

author = "Kazumasa Shibata and Hiroki Kuwano and Sumito Nagasawa and Katsuhiro Tanaka",

year = "2007",

month = apr,

day = "1",

language = "English",

pages = "13",

journal = "Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)",

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TY - JOUR

T1 - Micro Electric Power Generation Using A Micro Cantilever with PZT Thin Film

AU - Shibata, Kazumasa

AU - Kuwano, Hiroki

AU - Nagasawa, Sumito

AU - Tanaka, Katsuhiro

PY - 2007/4/1

Y1 - 2007/4/1

M3 - Article

SP - 13

JO - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

JF - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

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