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Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester
K. Shibata, S. Ishikawa, K. Tanaka, S. Nagasawa, Z. Cao, H. Oguchi, M. Hara, H. Kuwano
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Citations
(Scopus)