Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost

H. Kuwano, S. Tamonoki, S. Nagasawa

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication status	Published - 2007 Apr 1

Cite this

@article{25e3ea6dfa884cd9ab94c6585cf33e77,

title = "Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost",

author = "H. Kuwano and S. Tamonoki and S. Nagasawa",

year = "2007",

month = apr,

day = "1",

language = "English",

journal = "Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)",

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TY - JOUR

T1 - Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost

AU - Kuwano, H.

AU - Tamonoki, S.

AU - Nagasawa, S.

PY - 2007/4/1

Y1 - 2007/4/1

M3 - Article

JO - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

JF - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

ER -