Micro-machined micro ion source for flexible and concurrent process

S. Tamonoki, H. Kuwano, S. Nagasawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Micro-machined micro ion source for flexible and concurrent process'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds