| Original language | English |
|---|---|
| Pages (from-to) | 698-702 |
| Journal | Surface and Interface Analysis. |
| Volume | 34 (2002) |
| Publication status | Published - 1800 |
Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation.
M. Yoshitake, T. Akhadejdamrong, T. Aizawa, K. Yoshihara
Research output: Contribution to journal › Article › peer-review