Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array

Ryo Yoshida; Motoaki Hara; Hiroyuki Oguchi; Hiroki Kuwano

doi:10.1109/MEMSYS.2015.7050894

Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array

Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper describes development of the electrostatic planar extractors and lenses integrated with the ionic liquid ion source (ILIS) array to realize multi focused ion beam system. The extractors and the lenses reduced ion beam divergence angle from 11° to 7.9°. Also, switching control of ion beam was demonstrated by operating separated extractors. Finally we performed Si substrate etching using various kinds of ionic liquid. As a result, 3.3 times larger sputtering yield of 7.3 atom/ion at 83% lower acceleration voltage than those of conventional Ga⁺ focused ion beam (FIB) was achieved.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	93-96
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050894
Publication status	Published - 2015 Feb 26
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2015.7050894

Cite this

Yoshida, R., Hara, M., Oguchi, H., & Kuwano, H. (2015). Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 93-96). Article 7050894 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050894

Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array. / Yoshida, Ryo; Hara, Motoaki; Oguchi, Hiroyuki et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 93-96 7050894 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yoshida, R, Hara, M, Oguchi, H & Kuwano, H 2015, Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7050894, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 93-96, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7050894

Yoshida R, Hara M, Oguchi H, Kuwano H. Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 93-96. 7050894. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7050894

Yoshida, Ryo ; Hara, Motoaki ; Oguchi, Hiroyuki et al. / Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 93-96 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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abstract = "This paper describes development of the electrostatic planar extractors and lenses integrated with the ionic liquid ion source (ILIS) array to realize multi focused ion beam system. The extractors and the lenses reduced ion beam divergence angle from 11° to 7.9°. Also, switching control of ion beam was demonstrated by operating separated extractors. Finally we performed Si substrate etching using various kinds of ionic liquid. As a result, 3.3 times larger sputtering yield of 7.3 atom/ion at 83% lower acceleration voltage than those of conventional Ga+ focused ion beam (FIB) was achieved.",

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AB - This paper describes development of the electrostatic planar extractors and lenses integrated with the ionic liquid ion source (ILIS) array to realize multi focused ion beam system. The extractors and the lenses reduced ion beam divergence angle from 11° to 7.9°. Also, switching control of ion beam was demonstrated by operating separated extractors. Finally we performed Si substrate etching using various kinds of ionic liquid. As a result, 3.3 times larger sputtering yield of 7.3 atom/ion at 83% lower acceleration voltage than those of conventional Ga+ focused ion beam (FIB) was achieved.

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Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array

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