Micromachined pyroelectric probe for non-contact thermal diagnostic systems

Kenji Suita; Motoaki Hara; Shinya Ishikawa; Katsuhiro Tanaka; Sumito Nagasawa; Hiroki Kuwano

doi:10.1299/jamdsm.7.95

Micromachined pyroelectric probe for non-contact thermal diagnostic systems

Kenji Suita, Motoaki Hara, Shinya Ishikawa, Katsuhiro Tanaka, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journal › Article › peer-review

Abstract

This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O₃ (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

Original language	English
Pages (from-to)	95-102
Number of pages	8
Journal	Journal of Advanced Mechanical Design, Systems and Manufacturing
Volume	7
Issue number	2
DOIs	https://doi.org/10.1299/jamdsm.7.95
Publication status	Published - 2013
Externally published	Yes

Keywords

Cantilever
Infrared
MEMS
PZT
Sol-Gel

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

Access to Document

10.1299/jamdsm.7.95

Cite this

@article{926c8363144e4bf89c3d124b231cf3c9,

title = "Micromachined pyroelectric probe for non-contact thermal diagnostic systems",

abstract = "This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.",

keywords = "Cantilever, Infrared, MEMS, PZT, Sol-Gel",

author = "Kenji Suita and Motoaki Hara and Shinya Ishikawa and Katsuhiro Tanaka and Sumito Nagasawa and Hiroki Kuwano",

year = "2013",

doi = "10.1299/jamdsm.7.95",

language = "English",

volume = "7",

pages = "95--102",

journal = "Journal of Advanced Mechanical Design, Systems and Manufacturing",

issn = "1881-3054",

publisher = "Japan Society of Mechanical Engineers",

number = "2",

}

TY - JOUR

T1 - Micromachined pyroelectric probe for non-contact thermal diagnostic systems

AU - Suita, Kenji

AU - Hara, Motoaki

AU - Ishikawa, Shinya

AU - Tanaka, Katsuhiro

AU - Nagasawa, Sumito

AU - Kuwano, Hiroki

PY - 2013

Y1 - 2013

N2 - This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

AB - This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

KW - Cantilever

KW - Infrared

KW - MEMS

KW - PZT

KW - Sol-Gel

UR - http://www.scopus.com/inward/record.url?scp=84878967540&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84878967540&partnerID=8YFLogxK

U2 - 10.1299/jamdsm.7.95

DO - 10.1299/jamdsm.7.95

M3 - Article

AN - SCOPUS:84878967540

SN - 1881-3054

VL - 7

SP - 95

EP - 102

JO - Journal of Advanced Mechanical Design, Systems and Manufacturing

JF - Journal of Advanced Mechanical Design, Systems and Manufacturing

IS - 2

ER -

Micromachined pyroelectric probe for non-contact thermal diagnostic systems

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this