Micromachined pyroelectric probe for non-contact thermal diagnostic systems

Kenji Suita, Motoaki Hara, Shinya Ishikawa, Katsuhiro Tanaka, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticlepeer-review


This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

Original languageEnglish
Pages (from-to)95-102
Number of pages8
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Issue number2
Publication statusPublished - 2013
Externally publishedYes


  • Cantilever
  • Infrared
  • MEMS
  • PZT
  • Sol-Gel

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering


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