Micromachining of Polyimide Films by Proton Beam Writing

Y. Takeno; H. Nishikawa; H. Hayashi

Micromachining of Polyimide Films by Proton Beam Writing

Y. Takeno, H. Nishikawa, H. Hayashi

Regional Environment Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011)
Publication status	Published - 2011 Jun 1

Cite this

Micromachining of Polyimide Films by Proton Beam Writing. / Takeno, Y.; Nishikawa, H.; Hayashi, H.
In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011), 01.06.2011.

Research output: Contribution to journal › Article › peer-review

@article{95dabc4d5bd347b6ab6fc1f192fcfb92,

title = "Micromachining of Polyimide Films by Proton Beam Writing",

author = "Y. Takeno and H. Nishikawa and H. Hayashi",

year = "2011",

month = jun,

day = "1",

language = "English",

journal = "International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011)",

}

TY - JOUR

T1 - Micromachining of Polyimide Films by Proton Beam Writing

AU - Takeno, Y.

AU - Nishikawa, H.

AU - Hayashi, H.

PY - 2011/6/1

Y1 - 2011/6/1

M3 - Article

JO - International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011)

JF - International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011)

ER -