@article{c76e4df8d56a40be99e61db42e61fcdd,
title = "Microprocessing of arched bridge structures with epoxy resin by proton beam writing",
keywords = "Photolithography, Proton beam writing, SU-8 photoresist, Supercritical drying, Three dimensional structure",
author = "Katsuyoshi Takano and Atsushi Asano and Yuta Maeyoshi and Hiromi Marui and Masaaki Omichi and Akinori Saeki and Shu Seki and Takahiro Satoh and Yasuyuki Ishii and Tomihiro Kamiya and Masashi Koka and Takeru Ohkubo and Masaki Sugimoto and Hiroyuki Nishikawa",
year = "2012",
doi = "10.2494/photopolymer.25.43",
language = "English",
volume = "25",
pages = "43--46",
journal = "Journal of Photopolymer Science and Technology",
issn = "0914-9244",
publisher = "Tokai University",
number = "1",
}