Microstructure and bactericidal ability of photocatalytic TiO 2 thin films prepared by rf helicon magnetron sputtering

Lei Miao, Sakae Tanemura, Yoichi Kondo, Misao Iwata, Shoichi Toh, Kenji Kaneko

Research output: Contribution to journalConference articlepeer-review

45 Citations (Scopus)


The present study investigates the microstructure and bactericidal ability of polycrystalline and epitaxial TiO 2 thin films with anatase and rutile structure. Phase formation and the distortion of the lattice of the film compared with bulk are proved by TEM observation. HRTEM images assure the good crystal quality and compact structure of the films prepared by rf helicon magnetron sputtering. This obtained larger band gap due to the lattice deformation could contribute to the better photocatalytic effect of the anatase film. Bactericidal abilities evaluated by the photokilling E. Coli using film stick method under UV irradiation show the following result: Both single and polycrystal anatase films exhibit obvious bactericidal abilities while no distinguishing difference for them. On the other hand, no bactericidal ability is observed for rutile films in this work. The band gap value of rutile film is lower than the energy potential required to O 2 /O 2 - reductions according to the principle proposed by Fujishima et al. This resulted in the observed poor photocatalyst effect of rutile film.

Original languageEnglish
Pages (from-to)125-131
Number of pages7
JournalApplied Surface Science
Issue number1-4 SPEC. ISS.
Publication statusPublished - 2004 Nov 15
Externally publishedYes
EventAPHYS 2003 - Badajoz, Spain
Duration: 2003 Oct 132003 Oct 18


  • Bactericidal abilities
  • Helicon sputtering
  • Optical band gap
  • TEM analysis
  • TiO thin film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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