Microstructure and elasticity of glassy alloy surface by reactive and inert ion implantation

Shinji Muraishi, Hirono Naito, Tatuhiko Aizawa

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Present work focuses on the structural change of Zr-Cu glassy film via penetration of different reactivity of N+ and Ar+ and its elasticity measurement. Amorphous Zr-30at%Cu film has been synthesized by ion beam sputtering on Si substrate. Nitrogen implantation induced precipitation microstructure with (Zr-Cu) nitride and Cu phase in glassy matrix. Inert gas element of Ar+ makes voids structure inside of the film at the mean penetration depth of Ar+ as maintained glassy phase. Resultant microstructures due to penetrated ions strongly depend on their degree of chemical reactivity with constituents. Surface elasticity of modified structure have been evaluated from nano-indentation test and given the normalization treatment for measured Young's modulus.

Original languageEnglish
Pages (from-to)1859-1863
Number of pages5
JournalMaterials Transactions
Issue number7
Publication statusPublished - 2007 Jul
Externally publishedYes


  • Ion implantation
  • Metallic glass
  • Nano indenter
  • Transmission electron microscope
  • Zirconium nitride

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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