MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

Hisao Miyazaki, Rika Matsumoto, Masayuki Katagiri, Takashi Yoshida, Kazuyoshi Ueno, Tadashi Sakai, Akihiro Kajita

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br2, FeCl3, and MoCl5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl5) was partially oxidized and confined in the MLG.

Original languageEnglish
Article number04CP02
JournalJapanese Journal of Applied Physics
Issue number4
Publication statusPublished - 2017 Apr

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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