MOCVD-TiN barrirer for blanket W-CVD

K.Ohto K.Ohto; K.Ueno K.Ueno; K.Tsunenari K.Tsunenari; K.Numajiri K.Numajiri; M.Okamura M.Okamura; H.Jinba H.Jinba; Kazuyoshi Ueno

MOCVD-TiN barrirer for blanket W-CVD

K.Ohto K.Ohto, K.Ueno K.Ueno, K.Tsunenari K.Tsunenari, K.Numajiri K.Numajiri, M.Okamura M.Okamura, H.Jinba H.Jinba, Kazuyoshi Ueno

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	151-157
Journal	Advanced Metallization for ULSI Applications in 1993
Publication status	Published - 1993 Oct 1

Cite this

@article{7472e68c4fb443c7a08e7d208e96e677,

title = "MOCVD-TiN barrirer for blanket W-CVD",

author = "K.Ohto K.Ohto and K.Ueno K.Ueno and K.Tsunenari K.Tsunenari and K.Numajiri K.Numajiri and M.Okamura M.Okamura and H.Jinba H.Jinba and Kazuyoshi Ueno",

year = "1993",

month = oct,

day = "1",

language = "English",

pages = "151--157",

journal = "Advanced Metallization for ULSI Applications in 1993",

}

TY - JOUR

T1 - MOCVD-TiN barrirer for blanket W-CVD

AU - K.Ohto, K.Ohto

AU - K.Ueno, K.Ueno

AU - K.Tsunenari, K.Tsunenari

AU - K.Numajiri, K.Numajiri

AU - M.Okamura, M.Okamura

AU - H.Jinba, H.Jinba

AU - Ueno, Kazuyoshi

PY - 1993/10/1

Y1 - 1993/10/1

M3 - Article

SP - 151

EP - 157

JO - Advanced Metallization for ULSI Applications in 1993

JF - Advanced Metallization for ULSI Applications in 1993

ER -