Moisture barrier properties of single-layer graphene deposited on Cu films for Cu metallization

Ploybussara Gomasang, Takumi Abe, Kenji Kawahara, Yoko Wasai, Nataliya Nabatova-Gabain, Nguyen Thanh Cuong, Hiroki Ago, Susumu Okada, Kazuyoshi Ueno

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8 Citations (Scopus)


The moisture barrier properties of large-grain single-layer graphene (SLG) deposited on a Cu(111)/sapphire substrate are demonstrated by comparing with the bare Cu(111) surface under an accelerated degradation test (ADT) at 85°C and 85% relative humidity (RH) for various durations. The change in surface color and the formation of Cu oxide are investigated by optical microscopy (OM) and X-ray photoelectron spectroscopy (XPS), respectively. First-principle simulation is performed to understand the mechanisms underlying the barrier properties of SLG against O diffusion. The correlation between Cu oxide thickness and SLG quality are also analyzed by spectroscopic ellipsometry (SE) measured on a non-uniform SLG film. SLG with large grains shows high performance in preventing the Cu oxidation due to moisture during ADT.

Original languageEnglish
Article number04FC08
JournalJapanese Journal of Applied Physics
Issue number4
Publication statusPublished - 2018 Apr

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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