Multi-channel chemical sensor using surface acoustic wave device

T. Nomura, A. Saitoh, S. Furukawa

Research output: Contribution to journalConference articlepeer-review


Multi-channel SAW chemical sensor is first used to analytical system for organic gas detection. SAW sensors are easy to show a high frequency property, and can become multi-channel devices on a substrate. The features improve a sensor sensitivity and enables integration of sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of the each channel was used to make a response pattern. The each response to odorant solvents showed the different analyte specific patterns.

Original languageEnglish
Pages (from-to)423-426
Number of pages4
JournalProceedings of the IEEE Ultrasonics Symposium
Publication statusPublished - 1997 Dec 1
EventProceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2) - Toronto, Can
Duration: 1997 Oct 51997 Oct 8

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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