Abstract
Multi-channel SAW chemical sensor is first used to analytical system for organic gas detection. SAW sensors are easy to show a high frequency property, and can become multi-channel devices on a substrate. The features improve a sensor sensitivity and enables integration of sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of the each channel was used to make a response pattern. The each response to odorant solvents showed the different analyte specific patterns.
| Original language | English |
|---|---|
| Pages (from-to) | 423-426 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE Ultrasonics Symposium |
| Volume | 1 |
| Publication status | Published - 1997 Dec 1 |
| Event | Proceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2) - Toronto, Can Duration: 1997 Oct 5 → 1997 Oct 8 |
ASJC Scopus subject areas
- Acoustics and Ultrasonics