Multi-Directional switching valve chip with the rotary mechanism (3rd report, built-in bias spring mechanism and measurement of valve performance)

This paper describes the improvement of the multi-directional micro switching valve chip with ten outlets. This switching valve chip has a special rotary mechanism, allowing this chip to quickly switch among ten outlets under high pressure (higher than 500 kPa). However, users needed to adjust the positioning of the push-rod against the rotor and the positioning of the bias spring against the plunger, when users utilized the switching valve chip. Therefore, we developed the bias spring mechanism that doesn't need adjustment. The switching valve succeeded to built the bias spring mechanism into the chip. Moreover, the valve performance such as flow rate vs. pressure property was evaluated experimentally.