| Original language | English |
|---|---|
| Pages (from-to) | 155-163 |
| Journal | J. Ceramic Transaction. |
| Volume | 148 (2004) |
| Publication status | Published - 2003 Jun 1 |
N-implanted Ti thin film prepared by ion beam sputtering deposition.
S. Muraishi, T. Aizawa
Research output: Contribution to journal › Article › peer-review