Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl

M. Shimojo, W. Zhang, M. Takeguchi, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{1c81576bfa824792a0103491d5823c12,

title = "Nano-dot and nano-rod formation in electron beam induced deposition using iron carbonyl",

author = "M. Shimojo and W. Zhang and M. Takeguchi and M. Tanaka and K. Mitsuishi and K. Furuya",

year = "2005",

month = jan,

day = "1",

language = "English",

volume = "44",

pages = "5651--5653",

journal = "Jpn. J. Appl. Phys",

}