Nano-fabrication using a sub-nanometer-sized probe of high energy electrons

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, M. Song, K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{e0d12a8f5ae747f9b69ba9a31dd8f85b,

title = "Nano-fabrication using a sub-nanometer-sized probe of high energy electrons",

author = "K. Mitsuishi and M. Shimojo and M. Takeguchi and M. Tanaka and M. Song and K. Furuya",

year = "2003",

month = jan,

day = "1",

language = "English",

volume = "83",

pages = "2064--2066",

journal = "Appl. Phys. Lett.",

}